Indicative contents
The following topics will be covered, with approximately equal
amounts of time spent on each:
- Introduction to MEMS: Overview of microfabrication technologies
and precision engineering (Mechanical machining techniques,
Designer’s guide to high precision – 11 principles and techniques).
- Principles of actuation, elastic microstructures.
- Forces in micromechanics: elastic, surface tension,
electrostatic, electromagnetic, and thermal and piezoelectric.
- Scaling Laws
- Review of Nanotechnology Definitions and background, Scanning
Probe Microscope [SPM] methods, Surface and molecular manipulation
by SPM, The future prospects for Nanotechnology.
- Review of MEMS and Nanotechnology applications and case studies;
MEMS Markets & Business Aspects world wide, National and
international status in MEMS research.
Recommended reading
-
Books
- Nadim Maluf, An Introduction to Microelectromechanical
Systems Engineering (Artech House Mems Library) Artech
House; ISBN: 0890065810; (December 1999)
- Sergey Edward Lyshevski, Nano- and
Microelectromechanical Systems: Fundamentals of Nano- and
Microengineering, CRC Press; ISBN: 0849309166; (September
25, 2000)
- Journals
- Magazines
- Multimedia
- Internet Sites
Laboratory
Hardware:
Software:
Software Manuals:
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